Laser-Induced Self-Organized Periodic Nano-Hole/Nano-Ridge Structures on the Surface of Silicon Produced with a Tightly Focused Femtosecond Pulse Laser Beam
J.T. Xu, M. Zhou, D.Q. Yuan, N.F. Ren and D.Q. Lu
Periodic nano-hole, nano-ridge and ripple structures on silicon bulk were formed by a scanning tightly focused beam of the femtosecond laser with wavelength of 800 nm, a repetition rate of 1 kHz and the pulse length of 130 fs in air. The periodic nano-hole structures induced by one line scan which focus with a 20× focusing objective lens (NA = 0.4) is reported. Investigating the relationship between the width of structures and the speed of line scanning provided knowledge of the evolvement of the nano-hole and nano-ridge structures.
Keywords: Femtosecond laser, silicon, structures, nano-holes, nano-ridges, ripples