Underwater Pulsed Laser Etching of Silicon and an Analysis of the Induced Mechanical Effects
Y-H. Long, B. Zhang, X-Q. Yang, T-L. Shi and L-C. Xiong
To explore further the characteristic of mechanical effects in the process of great-energy and short pulse laser irradiating matter under water, the experiment of laser machining under water was adopted and the experiment results are studied. Simultaneously, mechanical effects in great-energy laser machining under water were analysed in detail, and the removal mechanism of brittle material by mechanical effects was also discussed. Experiment results indicate that brittle material removal rate by mechanical effects is relatively great.
Keywords: Excimer laser, silicon, water, under water, etching, pulsed, short pulse, mechanical effects