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A Survey on Multiphoton Lithography for Fabricating Optical Microdevices
Vinicius Tribuzi, Adriano J. G. Otuka, Gustavo F. B. Almeida, Daniel S. Correa and Cleber R. Mendonça

Multiphoton lithography is a promising microfabrication technique to produce complex microstructures. Besides the ability to make 3D structures with very few constrains, this technique provides sub-micrometric resolution and high fabrication speed. Furthermore, it also allows for incorporating a variety of organic and/or inorganic dopants into the polymeric matrix, leading to functional structures with tailored properties. It is therefore possible to produce microdevices for a wide range of applications. In this review we show a series of recent advances regarding methods to introduce different types of material into the microstructures and ways to characterize those microdevices. The fabrication of doped samples using multiphoton lithography allows for the exploration of the unique properties from metallic and semiconductor nanoparticles, as well as a variety of organic compounds. Here we emphasize the production of optically-active samples exhibiting variable or broadband emission spectra, which are suitable for applications in electronic and photonic devices.

Keywords: two-photon polymerization, multiphoton lithography, doped microstructures, optically active devices, metallic nanoparticles, fluorescent microstructures, functional devices

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