Thermal conductivity measurement of Ge2Sb2Te5 thin film using improved 3ω method
Kyeongtae Kim and Ohmyoung Kwon
Understanding how heat is transferred in nanostructured materials is essential for improving nanoscale devices and developing novel devices. In particular, the measurement and analysis of heat transfer in phase change random access memories (PCRMs) are important, because this local heat transfer determines the development and innovation of PCRMs. In this study, we improved the existing 3ω method to measure the thermal conductivity of a nanoscale thin film composed of Ge2Sb2Te5 (GST), whose thermal conductivity is changed by the limitation of phonons’ transport. The heat transfer of the thin GST film was analyzed by applying the phonons’ kinetic theory (gray model) and measurement results from the improved 3ω method. The measured thermal conductivity of GST and the improved 3ω method are expected to be used in the phase change random-access memory industry for developing novel devices.
Keywords: thermal property, phase change material, GST, 3 omega method