Angular Distribution of Sputtered Vanadium and Dioxide Particles from VO2 Under 5 keV Kr+ Bombardment with Oblique Incidence: Application to Smart Window Thermochromic
K. Bria, M. Ait El Fqih, J-M. Nunzi, L. Jadoual and A. Kaddouri
Windows are one of the least energy-efficient parts of buildings. Energy consumption can be minimized using smart thermochromic windows. These ones can be engineered using a coating with vanadium dioxide, a thermochromic phase change material. Such technology has the potential to reduce carbon emissions related to heating and cooling, improving the sustainability of buildings. For building applications, the coating should be deposited at low cost on large area window glass. In this paper, we focus on sputtering like a coating technique. We study the angular distribution of vanadium oxide (VO2) particles sputtered at normal incidence. The binary collision Monte Carlo simulation (SDTrimSP) and the Stopping and Range of Ions in Matter (SRIM)-codes are used to obtain the angular distribution of the VO2 particles. The simulation is done for a large number of 5 keV Kr+ incident ions and the computer count the particles emitted in a solid angle. The sputtering efficiencies are compared with results from the literature.
Keywords: Sputtering, VO2, smart window, SDTrimSP, SRIM