Design and Development of Piezoresistive Microcantilever for Biosensing Applications
Rambabu Busi, Talam Satyanarayana, M. Harshada and Miranji Katta
This paper presents, a microcantilever designed using MEMS technology was considered for the development of a biosensor. This device is fabricated with Silicon substrate (600 micron thick), Silicon Oxide (bottom-1 micron and top-150 nm thick), Poly Silicon (150 nm thick) and Gold (200 nm thick) coating embedded polysilicon layers. The polysilicon coating serves as a piezoresistor, causes quantifiable deformation according to applied tensile and compression forces. The detection range of resistance between 0Ω and 74 kΩ. It is observed that maximum resistance change is obtained for biotin adsorption concentration greater than 88μg/mL. However, resistance changes related to biotin adsorption is achieved at concentrations. With this experimental analysis the device is found suitable for use as biosensor.
Keywords: Microcantilever, biosensor, COMSOLV5.2a, piezoresistive, adsorption