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Design and Fabrication of Circular Gratings Based on Digital Virtual Mask Fabrication Technology
Y. Xiao, L. Huang, H. Wu, X. Sun, W. Xiao and J. Duan

This study presents a method to design and fabricate circular gratings (CG) based on digital virtual mask fabrication technology realized by digital micromirror device (DMD) system. Experimental results have been obtained with several circular gratings. And the results verify that this method is feasible and efficient.

Keywords: He-Cd laser, circular gratings (CG), digital virtual mask, digital micromirror device (DMD)

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