Fabrication of Poly(methyl methacrylate) (PMMA) Microfluidic Chip with Cantor Fractal Structure Using a CO2 Laser System
Z. Wu, X. Chen, Y. Zheng and T. Wang
CO2 laser processing technology is a low cost, simple and efficient processing method for fabrication of microfluidic chip on Poly(methyl methacrylate) (PMMA). In this paper, we study the influence of low power and low speed of laser processing on the PMMA microchannel. Laser power was set from 5 to 15 W and laser traverse is set from 6 to 10 mm/s in the experiment. Though experiment results to compare the influence of laser processing parameters on the depth and width of microchannel. The suitable parameters are selected to process the microchannel on the PMMA plate. Finally, a PMMA microfluidic chip with Cantor fractal structure is fabricated by the method of hot pressing bonding. The experiment results show that CO2 laser processing technology is a low cost, flexible and convenient method in the microfluidic chip processing.
Keywords: CO2 laser, polymethyl methacrylate (PMMA), hot bonding, Cantor fractal structure, advanced manufacturing