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Organic Electroluminescent Device on ITO Smoothed with Ar Cluster Ion Beam
Claire Heck, Takeru OOsawa, Masayuki Chikamatsu, Nobutaka Tanigaki, Toshio Seki and Jiro Matsuo

Smoothing of ITO substrate with gas cluster ion beam is proposed as an effective way of improving the performance of organic electroluminescent (EL) devices. The study of optical and electrical properties of a device ([a-NPD] / [Alq3] / [Mg- Ag]) produced on ITO substrate showed that light emission spectra were similar before and after smoothing the substrate. On the other hand, EL efficiency was considerably improved (about 30%) in devices produced on the smoothed ITO substrates.

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